Integrated Circuit Fabrication: Science and Technology [Plummer] 9781009303583

Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook. It includes an early introduction of a state-of-the-art CMOS process flow, exposes students to big-picture thinking from the outset, and encourages a practical integration mindset. Extensive use of process and TCAD simulation, using industry tools such as Silvaco Athena and Victory Process, provides students with deeper insight into physical principles, and prepares them for applying these tools in a real-world setting. Accessible framing assumes only a basic background in chemistry, physics and mathematics, providing a gentle introduction for students from a wide range of backgrounds; and over 450 figures (many in color), and more than 280 end-of-chapter problems, will support and cement student understanding. Accompanied by lecture slides and solutions for instructors, this is the ideal introduction to semiconductor technology for senior undergraduate and graduate students in electrical engineering, materials science and physics, and for semiconductor engineering professionals seeking an authoritative introductory reference.

頁數：680
版次：第1版
年份：2024年
規格：精裝/彩色
ISBN：9781009303583

1 - Historical Perspective, Moore’s Law and Future Technology Prospects
2 - Modern Complementary Metal-Oxide–Semiconductor (CMOS) Technology
3 - Semiconductor Materials: Crystal Growth, Wafer Preparation and Material Properties
4 - Semiconductor Manufacturing: Cleanrooms, Wafer Cleaning, Gettering and Chip Yield
5 - Lithography
6 - Semiconductor/Insulator Interfaces
7 - Doping in Semiconductors
8 - Ion Implantation
9 - Etching Technologies and Chemical–Mechanical Polishing
10 - Deposition Technologies
11 - Back-End (Interconnect) Processing Technologies
A.1 - Basics of Semiconductor Materials in Equilibrium
A.2 - Standard Prefixes
A.3 - Useful Conversions
A.4 - Physical Constants
A.5 - Physical Properties of Silicon
A.6 - Properties of Insulators Used in Semiconductor Technology
A.7 - Color Chart for Thermally Grown SiO2 Films Observed Perpendicularly under Daylight Fluorescent Lighting
A.8 - Irvin Curves
A.9 - Error Function
A.10 - List of Important Symbols
A.11 - List of Common Acronyms